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Energy Dispersive X-Ray Spectrometer (EDX)

Manufacturer Philips XL40
Model XL40
Application This instrument can help the user to examine larger specimens at higher magnifications, resulting in an increase in the range of specimens for non-destructive investigation. Scanning electron microscope is the preferred choice for advanced materials such as ceramics, metals (with their high- quality coatings) and wafers (as used for the manufacturing of complex, high-density integrated circuits). Optimized for high brightness/high beam current operation, this ultra-stable electron source significantly extends the use of high spatial resolution combined with quality elemental analysis, particularly in the low kV range of operation. Analytical Capabilities can be expanded by integration of an EDX system and application of automation software to allow full support of unattended multiple-sample analysis.

Main Specification

Resolution 2.5 nm at 30 kV and 5 nm at 1 kV.
Scan Rotation -180° to + 180°
Magnification Range X = 150 mm, Y = 150 mm, Rotation = n x 360°
Tilt range at eccentric position of Z = 10mm is -30° to +45°, Small specimens to 60°
Inside Chamber Dimensions 379 x 280 x 315 mm (x,y,z)
Basic Detection Modes Secondary and/or back scattered electrons with high efficiency longlife scintillator equipped Everhart-Thornley detector. Automatic control of contrast and brightness. Grid bias control continuous from -150V to +300V.

Result

Solder Bump

Solder Bump

EDX Result

EDX Result