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Micro- Nano- Objects - Nature or Manufacture?

Abstract

We experience micro- nano-scale objects in our everyday lives, from head-lice to integrated circuits, from biological systems in nature to information systems made by human-kind. This talk will touch upon some of the issues associated with micro- nano-scale objects and systems – including materials, technology, manufacture and concerns related to the micro- and nano- length scales.

Speaker Biographical Sketch

Professor Cheung has an international reputation for her contribution in the development and application of micro- and nano- fabrication. Her major research interests to date span: micro- nano- fabrication technology; process-related defects; microwave electronics; low dimensional structures and optical spectroscopy. More recently, at the University of Edinburgh, her research interests extended to include microelectromechanical systems, carbon nanotubes and metamaterials/devices.

Rebecca Cheung was awarded a First Class Honours Degree in Electronics and Electrical Engineering from the University of Glasgow in 1986. After completing her PhD degree at the same University, funded by the Croucher foundation scholarship, she worked in prestigious institutions all over the world, including, IBM Thomas J. Watson Research Centre in Yorktown Heights, USA; Delft Institute of Microelectronics and Submicron Technology, The Netherlands; Laboratory for Electromagnetic Fields and Microwave Electronics, ETHZ, Switzerland and the Nanoelectronics Research Center at Glasgow, performing research on various topics related to semiconductor technology, process-induced materials damage, quantum transport, mesoscopic physics in SiGe heterostructures and microwave circuits in InP for gigabit electronics. Additionally, she had been a founding member of the "Nanostructure Engineering Science and Technology" (NEST) Group (now the Macdiarmid Institute) at the University of Canterbury in New Zealand in 1998.

Professor Cheung's pioneering work include the successful pattern transfer of 30nm lines etched anisotropically into GaAs during the 80s, the discovery of the nature of etch-induced defects via mesoscopic systems as well as the novel development of low damage dry etch processes in III-V materials for gigabit electronics. More recently, in addition to Professor Cheung's leading carbon nanotube electronics research, she has been instrumental in applying a novel etch and release process (patented) in the manufacture of SiC microelectromechanical systems as well as designing new fabrication process sequences for SiC resonators, pressure sensors and accelerometers integrated with electronics.

Professor Cheung has published over 100 scientific articles with more than 70 peer-reviewed papers, including 5 invited review papers and one book. She has given more than 10 invited talks, has graduated 6 PhD students and is supervising 1 post-doctoral fellow and 6 PhD students actively. Recently, Professor Cheung has been interviewed by BBC Radio Scotland about her work on silicon carbide resonators, a Proof-of-Concept project funded by Scottish Enterprise.

Professor Cheung currently holds a Chair in Nanoelectronics at the University of Edinburgh, is Head of the Graduate School and Deputy Head of the Institute for Integrated Micro- and Nano- Systems at the School of Engineering & Electronics. She serves in various conference committees and review panels, is a Fellow of the IET, a Senior Member of the IEEE, a member of the EPSRC Peer Review College and is an Honorary Professor within the School of Engineering and Physical Sciences at Heriot-Watt University.

Date: 6 March 2009 (Friday)
Time: 2:00pm – 3:30pm
Venue: Rm B6605, 6/F, Lift 3, Academic Bldg, City University of Hong Kong,
83 Tat Chee Avenue, Kowloon Tong, Kowloon,
Hong Kong.
Fee: Complimentary
Medium of Instruction: English

For seat reservation, please call May Wong at tel :2788 7379 before 28 February 2009.