Optoelectronics, Electronics, Power, Nanotechnology
                                       and Biosystems Laboratory
Department of Electrical Engineering, City University of Hong Kong

Consultancy services

To serve the Hong Kong, China, and international optoelectronics industries by providing consulting, training and technology transfer

What we can offer


Basic micro-fabrication training module

A comprehensive training module including both theoretical course and practical demonstration. This is specially designed to new users who has no prior experience on micro-fabrication of semiconductor, glass or polymer optical waveguide/devices.

The module divided into 2 parts:

1. Lithography processing and application (theoretical course)
        - What is lithography
        - Different steps of lithography processing (starting from sample cleaning)
        - positive and negative resist
        - lift-off process and etching
        - other related processing techniques
 2. Processing demonstration (Practical session)
        several processing techniques will be demonstrated including:
        - clean room entry procedures
        - resist processing ( spinning, softbake, expose and development)
        - chemical treatment
        - step profiler usage (Tencor alpha step profiler 500)
        - film deposition by thermal evaporation (Edwards Auto 360)

Advanced/ Individual Equipment training module

A training to provide hand on experience on the usage of the following advanced equipments.

  • Laurell WS650B-6NPP LITE Spinner
  • Karl Suss MJB4 Aligner
  • Ambios XP-2 profiler
  • Tencor alpha step profiler 500
  • Edwards Auto 306 Evaporator
  • Metrion 2010 Prism coupling system
  • RF magnetron sputtering system
  • Denton Deskpro RF sputtering system
  • Thermoplasma 320 Reactive ion beam etching system
  • Oxford ICP 65 Inductively coupled plasma etching system
  • Thermomicroscope CP Research Scanning probe microscope
Remark: Users are not allowed to access any equipments unless they have attended the training course and passed the qualifing examination.


Optical Devices Design

Device Characterisation and Measurement

Use of Laboratory Facilities

Expert Withness

R & D Collaboration

Innovation and Technology Fund (ITF)

Specific R&D Projects

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